| EPSRC Reference: |
GR/L26377/01 |
| Title: |
ELECTRICALLY DETECTED MAGNETIC RESONANCE TECHNOLOGY FOR DEFECT CHARACTERIZATION OF ELECTRONIC DEVICES |
| Principal Investigator: |
Keeble, Professor DJ |
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| Department: |
Electronic Engineering and Physics |
| Organisation: |
University of Dundee |
| Scheme: |
JREI |
| Starts: |
18 February 1997 |
Ends: |
17 August 1998 |
Value (£): |
27,500
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Summary on Grant Application Form |
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The aim of this research is to gain insight into defects in next generation electron devices through the development of a novel non-destructive testing method. The proposal evaluates the technique of electrically detected magnetic resonance (EDMR) as a method for ultra-high sensitivity material defect characterisation of electronic device structures and materials. The method has the potential for in-situ detection and identification of electronically active defect centres through the detection of defect medicated changes in device transport current. This technology is relevant to electronic materials processing and device fabrication industries where, as device scales reduce, the importance of material defects has increased. The potential of this technique is consistent with the current search impurity and defect techniques capable of attaining sub 10E10 cm-3 (<<1 in 10E12) levels of sensitivity.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.dundee.ac.uk |