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Details of Grant 

EPSRC Reference: GR/L21044/01
Title: THE DEVELOPMENT AND APPLICATION OF FOCUSED ION BEAM FABRICATION AND SCANNING ION MICROSCOPY
Principal Investigator: Blamire, Professor M
Other Investigators:
Humphreys, Professor Sir C Moore, Dr DF
Researcher Co-Investigators:
Project Partners:
Pre Nexus Migration
Department: Materials Science & Metallurgy
Organisation: University of Cambridge
Scheme: Standard Research (Pre-FEC)
Starts: 01 December 1996 Ends: 31 May 2000 Value (£): 378,764
EPSRC Research Topic Classifications:
Materials Characterisation Materials Processing
EPSRC Industrial Sector Classifications:
Electronics
Related Grants:
Panel History:  
Summary on Grant Application Form
There is a growing demand within the University for general access to scanning ion microscopy (SIM) and focused ion-beam (FIB) processing. The main applications, which arise from the use of ions as the scanned species, include compositional imaging, direct etching of material in selected regions, microfabrication, transmission electron microscopy with sub-10nm resolution imaging provides a means of performing experiments which would otherwise be impossible or unreasonably time-consuming. Through a collaborative programme with FEI Europe Ltd. we aim to provide a state of the art SIM system for researchers to permit both the development of new applications of existing techniques and the wider use and development of these techniques in making established projects progress more efficiently. In addition we also intend to explore applications in areas in which SIMs offer great, but as yet undeveloped, potential, and to develop industrial applications for FIB processing. Through a symposium organised in Cambridge we have already demonstrated a considerable level of industrial interest in the use of SIM techniques which we will expand to promote the application of these techniques.
Key Findings
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Potential use in non-academic contexts
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Summary
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Organisation Website: http://www.cam.ac.uk