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Details of Grant 

EPSRC Reference: GR/L06805/01
Title: DIAMOND FIELD EMITTERS FOR NANOLITHOGRAPHY
Principal Investigator: Foord, Professor J
Other Investigators:
Jackman, Professor RB
Researcher Co-Investigators:
Project Partners:
Department: Oxford Chemistry
Organisation: University of Oxford
Scheme: Standard Research (Pre-FEC)
Starts: 01 October 1996 Ends: 30 June 1997 Value (£): 14,622
EPSRC Research Topic Classifications:
Materials Synthesis & Growth
EPSRC Industrial Sector Classifications:
Manufacturing
Related Grants:
Panel History:  
Summary on Grant Application Form
A hybrid technology is to be explored which combines the throughput advantages of photolithography with the resolution capabilities of electron beam lithography for the formation of nanostructures. The formation of patterns of electron emitters will be investigated by ion or electron beam bombardment of thin film diamond. It is proposed that these could then be used as a mask plate for electron beam lithography.
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Further Information:  
Organisation Website: http://www.ox.ac.uk