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Details of Grant 

EPSRC Reference: GR/K71493/01
Title: FULLERENE SELECTIVE AREA GROWTH OF DIAMOND
Principal Investigator: Foord, Professor J
Other Investigators:
Jackman, Professor RB
Researcher Co-Investigators:
Project Partners:
Department: Oxford Chemistry
Organisation: University of Oxford
Scheme: Standard Research (Pre-FEC)
Starts: 01 March 1996 Ends: 28 February 1998 Value (£): 57,284
EPSRC Research Topic Classifications:
Materials Processing
EPSRC Industrial Sector Classifications:
Electronics
Related Grants:
Panel History:  
Summary on Grant Application Form
CVD diamond has great potential in microengineering as an ultra-low wear coating and fabricating material, as well as in other nanostructure applications. A major existing hurdle is to establish routes for the nanofabrication of diamond structures. We investigate two routes: (i) selective area growth; (ii) excimer laser projection patterning. The reaction between C60 and patterned Si/SiO2 substrates will be investigated to identify reaction conditions for selective C deposition in the Si windows. Subsequent diamond growth will then be carried out on these activated wafers in order to prepare diamond nanostructures. The influence of process parameters on nanostructures prepared by laser projection patterning will be investigated in order to improve control of side-wall angle, graphitisation and surface roughness. An overall objective is to identify the characteristics and capabilities of these important approaches to diamond nanofabrication, which are fundamental to the future of CVD diamond as a nanostructure material.
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Organisation Website: http://www.ox.ac.uk