| EPSRC Reference: |
GR/K71479/01 |
| Title: |
EXCIMER LASER FABRICATION OF 3D MICROSTRUCTURES-A BASI C STUDY |
| Principal Investigator: |
Smith, Dr R |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
Physics |
| Organisation: |
Imperial College London |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 October 1995 |
Ends: |
30 September 1997 |
Value (£): |
79,896
|
| EPSRC Research Topic Classifications: |
| Materials Characterisation |
|
|
| EPSRC Industrial Sector Classifications: |
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
Development and validation of a model for projection lithography using excimer lasers in ablation mode, to provide detailed information about the three-dimensional structure produced by particular mask patterns under different process conditions. Experimental work at RAL will provide input data for the modelling at Imperial College, and the validation of the model during its development. The ablation technique has potential in the field of microengineering due to its ability to process a wide range of materials, and to define complex three-dimensional microstructures. The work will aim to establish the ultimate capabilities of the process.
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
http://www.imperial.ac.uk |