Details of Grant 

EPSRC Reference:	GR/K54755/01
Title:	MICROMACHINED QUADRUPOLE MASS SPECTROMETER
Principal Investigator:	Taylor, Professor S
Other Investigators:	Nuttall, Dr KI Leck, Professor J
Researcher Co-Investigators:
Project Partners:	Pre Nexus Migration
Department:	Electrical Engineering and Electronics
Organisation:	University of Liverpool
Scheme:	Standard Research (Pre-FEC)
Starts:	01 February 1996	Ends:	30 April 1998	Value (£):	93,183
EPSRC Research Topic Classifications:	Electronic Devices & Subsys. Instrumentation Eng. & Dev.
EPSRC Industrial Sector Classifications:	Manufacturing
Related Grants:
Panel History:
Summary on Grant Application Form
The aim of the proposal is to develop and demonstrate a cheap, compact silicon-based mass-spectrometer for use in the next generation of residual gas analysers. The mass-spectrometer will be constructed using recently-developed microengineering methods of fabrication, in collaboration with Liverpool University and VG Instruments. The overall design of the instrument will be performed at Liverpool. The ion source and mass filter will be developed at Imperial College. The former will be based on a field-emitter array, the latter on an electronically-scanned quadruple lens. The detector (based on a CMOS electrometer) and associated electronics will be developed by Liverpool University. Overall assembly will be performed by Imperial College and testing of the complete system by Liverpool University.
Key Findings
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
Potential use in non-academic contexts
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
Impacts
Description This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk Summary Date Materialised
Sectors submitted by the Researcher
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
Project URL:
Further Information:
Organisation Website:	http://www.liv.ac.uk