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Details of Grant 

EPSRC Reference: GR/K54182/01
Title: A STUDY OF RF DRIVEN HYDROGEN DISCHARGES
Principal Investigator: Graham, Professor WG
Other Investigators:
Researcher Co-Investigators:
Project Partners:
Department: Sch of Mathematics and Physics
Organisation: Queen's University of Belfast
Scheme: Standard Research (Pre-FEC)
Starts: 11 May 1995 Ends: 10 May 1998 Value (£): 205,271
EPSRC Research Topic Classifications:
Plasmas - Technological
EPSRC Industrial Sector Classifications:
Related Grants:
Panel History:  
Summary on Grant Application Form
The sheath structure in rf driven hydrogen discharges will be studied using a range of time and space resolved diagnostic techniques. This will allow the electron heating mechanisms, which create and sustain such discharges, to be explored. An important part of the programme will be the measurement of the electron energy distribution function in the discharge, a key parameter in characterising the discharge.Low temperature plasmas of the type to be studied here are of both great intrinsic and techological interest. The challenge of understanding the complex interplay of plasma, atomic, molecular, surface and chemical processes that is inherent in the study of such plasmas is matched by their exciting applications. Recent developments in the ability to model complex systems in computer simulations, to acquire and process data rapidly and developments in diagnostic techniques, particularly those using lasers, has revived interest in the study of these complex systems. These developments have opened up the possibility of CAD-based design of plasma processing systems.
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Organisation Website: http://www.qub.ac.uk