| EPSRC Reference: |
GR/K37895/01 |
| Title: |
ROPA: THE USE OF ELECTRON STIMULATED DESORPTION FOR SURFACE ENGINEERING & SEMICONDUCTOR DEVICE FABRICATN |
| Principal Investigator: |
Ritchie, Professor D |
| Other Investigators: |
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| Department: |
Physics |
| Organisation: |
University of Cambridge |
| Scheme: |
ROPA |
| Starts: |
01 January 1995 |
Ends: |
30 June 1997 |
Value (£): |
148,136
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| Panel History: |
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Summary on Grant Application Form |
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1) The development of electron stimulated desorption (ESD) as a decontamination technique for GaAs; 2) The use of ESD in the fabrication of advanced semiconductor devices; 3) The design of an optimised electron gun for the ESD process.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.cam.ac.uk |