| EPSRC Reference: |
GR/K34917/01 |
| Title: |
OPTIMIZATION AND CONTROL OF LASER PHOTOCHEMICAL DEPOSITION AND LASER CHEMICAL VAPOUR DEPOSITION. |
| Principal Investigator: |
Meech, Professor S |
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| Department: |
Chemistry |
| Organisation: |
University of East Anglia |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
15 September 1994 |
Ends: |
14 March 1997 |
Value (£): |
80,351
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| EPSRC Research Topic Classifications: |
| Materials Synthesis & Growth |
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Summary on Grant Application Form |
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Remarkably little is known about the microscopic kinetics of LPD and LCVD. The lack of understanding in this area inhibits the optimisation of these processes, in terms of efficiency, track purity, contact resistance. This in turn prevents the full exploitation of laser deposition in interconnect technology/device manufacture. We propose novel experiments which will uncover the microscopic kinetics and point the way to full control of the deposition process, most notably in terms of power and photolysis wavelength, substrate temperature, most appropriate precursor etc.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.uea.ac.uk |