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Details of Grant 

EPSRC Reference: GR/J53706/01
Title: ADAPTIVE CONTROL OF SEMICONDUCTOR PROCESSING PLASMA SYSTEMS
Principal Investigator: Lisboa, Professor P
Other Investigators:
Jones, Professor G R Russell, Professor P
Researcher Co-Investigators:
Project Partners:
Pre Nexus Migration
Department: Electrical Engineering and Electronics
Organisation: University of Liverpool
Scheme: Standard Research (Pre-FEC)
Starts: 04 January 1994 Ends: 03 September 1997 Value (£): 127,885
EPSRC Research Topic Classifications:
Plasmas - Technological
EPSRC Industrial Sector Classifications:
Related Grants:
Panel History:  
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Date Materialised
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Further Information:  
Organisation Website: http://www.liv.ac.uk