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Details of Grant 

EPSRC Reference: GR/J37041/01
Title: PIEZOELECTRIC THIN FILMS FOR SAW STRAIN SENSORS
Principal Investigator: Hall, Dr DA
Other Investigators:
Sale, Professor F
Researcher Co-Investigators:
Project Partners:
Pre Nexus Migration Sensor Technology Ltd
Department: Manchester Materials Science Centre
Organisation: Victoria University of Manchester, The
Scheme: Standard Research (Pre-FEC)
Starts: 01 April 1994 Ends: 31 March 1997 Value (£): 312,027
EPSRC Research Topic Classifications:
Materials Processing
EPSRC Industrial Sector Classifications:
Manufacturing
Related Grants:
Panel History:  
Summary on Grant Application Form
The main aim of the proposed work will be to evaluate a range of piezoelectric thin films for use in SAW strain sensors. Such devices are a radical alternative to conventional resistance strain gauges and offer substantial improvements in sensitivity and reduction in cost, together with unique electrical characteristics which could provide the means for a wide range of completely novel sensors. Work will be conducted on aluminium nitride and zinc oxide thin films produced by RF sputtering and on ferroelectric (lead titanate-based) thin films produced by sol-gel deposition. The films produced will be subjected to basic structural and electrical characterisation, and prototype thin film SAW strain sensors will be produced for mechanical testing both within the Centre and at a number of collaborating industrial companies. The performance of the devices will be assessed in terms of strain sensitivity, linearity, and mechanical hysteresis. Additional work will be carried out in order to determine the feasibility of fabricating passivated SAW strain sensors which would have advantages in terms of ease of handling and general robustness.
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