| EPSRC Reference: |
GR/J35481/01 |
| Title: |
NEW FUNCTIONALISED POLYSILANES FOR APPLICATION AS RESISTS IN VLSI |
| Principal Investigator: |
Jones, Professor D |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Chemistry |
| Organisation: |
University of Kent |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 March 1994 |
Ends: |
28 February 1997 |
Value (£): |
120,233
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| EPSRC Research Topic Classifications: |
| Materials Synthesis & Growth |
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Summary on Grant Application Form |
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The programme will synthesise a range of novel functionalised polysilanes, notably those containing metal substituents, with the aim of achieving enhanced performance as electron-beam resists for VLSI applications. Two principal strategies will be pursued: syntheses of novel functionalised monomers followed by their polymerisation; functionalisation of preformed polysilanes. The syntheses will depend on our group's expertise which combines polymerisation and organometallic methodologies. The novel polymers will be fully structurally characterised and evaluated for their potential applications in microlithography. Their other properties such as electrical conductivity will also be examined.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.kent.ac.uk |