| EPSRC Reference: |
GR/J27967/01 |
| Title: |
METALLISATION AND SILICIDATION OF POROUS SIICON |
| Principal Investigator: |
Earwaker, Dr L |
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| Department: |
School of Physics and Astronomy |
| Organisation: |
University of Birmingham |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 June 1994 |
Ends: |
31 July 1996 |
Value (£): |
95,311
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| EPSRC Research Topic Classifications: |
| Materials Synthesis & Growth |
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Summary on Grant Application Form |
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Techniques already developed by the applicant for the deposition of metals and metal silicides down the pores of porous silicon (PS) will be extended and improved. In particular, the CVID (Chemical Vapour Infiltration and Decomposition) approach will be modified by using precursors such as SiH3M(CO)5 (M=Mn, Re) that are more stable thermally, the infiltration conditions will be improved, and highly-etched luminescent PS samples will be used in addition to normal narrow- and wide-pore material. Deuterated precursors will be used in conjunction with rapid-scan mass spectroscopy to gain information on the nature of the pore walls and their interaction with precursors.In all cases, the resulting wafers will be analysed for composition (including depth profiling and structure) by a range of physical methods, including (a) Rutherford Back Scattering, (b) Nuclear Reaction Analysis, (c) Scanning Electron Microscopy, (d) Extended X-ray Absorption Fine structure, (e) Solid-state Nuclear Magnetic Resonance Spectroscopy, and (f) Infrared spectroscopy. ((a) - (d) will be carried out by University of Birmingham staff under a proposal parallel to this one; (e) - (f) will be done at OMW). The results of these measurements will then be used to optimise the deposition conditions needed to provide suitable characteristics.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.bham.ac.uk |