| EPSRC Reference: |
GR/J06771/01 |
| Title: |
THREE DIMENSIONAL NANOMETRE MICROELECTRONICS |
| Principal Investigator: |
Pepper, Professor Sir M |
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| Department: |
Physics |
| Organisation: |
University of Cambridge |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 April 1993 |
Ends: |
31 March 1995 |
Value (£): |
934,309
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| EPSRC Research Topic Classifications: |
| Electronic Devices & Subsys. |
Materials Characterisation |
| Materials Synthesis & Growth |
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Summary on Grant Application Form |
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The overall programme is structured to explore new areas of pure and applied physics in the field of electronic and optical properties of semiconductor structures. The programme supports two III-V MBE growth machines along with sample processing and assessment facilities. The first machine is augmented with unique in situ processing facilities using focused ion and electron beams. With this system new structures are being fabricated which have novel physical properties. The second machine is being used for the growth of ultra-high purity GaAs/AlGeAs for exploitation in quantum scale structures. The proposed programme is for support to continue this work, together with the development of a new in situ process using radical ion etching. This will enable the growth of structures on patterned substrates which allows the intrinsic accuracy of the MBE growth process to be exploited in the lateral direction. When combined with the existing focused beam facilities, very powerful techniques for fully three dimensional band structure engineering will be available. These facilities support the activities of 27 research workers and 22 research students within the Semiconductor Physics area, as well as 5 other collaborators and their students at the Cavendish Laboratory. Collaborations exist with workers at 6 other universities and 2 industrial research laboratories. This work has led to 75 publications during the period 1990-1992.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.cam.ac.uk |