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EPSRC Reference: GR/G42839/01
Title: APPLICATION OF SEM CHANNELING CONTRAST IMAGING OF DEFECTS TO SEMICONDUCTORS AND FRACTURE PROBLEMS
Principal Investigator: Hirsch, Sir P
Other Investigators:
Long, Dr N Czernuszka, Dr J Booker, Dr GR
Researcher Co-Investigators:
Project Partners:
Department: Materials
Organisation: University of Oxford
Scheme: Standard Research (Pre-FEC)
Starts: 01 June 1991 Ends: 31 May 1992 Value (£): 30,184
EPSRC Research Topic Classifications:
EPSRC Industrial Sector Classifications:
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Panel History:  
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Organisation Website: http://www.ox.ac.uk