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Details of Grant 

EPSRC Reference: GR/G16809/01
Title: NANOMETRE-SCALE ELECTRON BEAM LITHOGRAPHY MECHANISMS AND APPLICATIONS
Principal Investigator: Humphreys, Professor Sir C
Other Investigators:
Researcher Co-Investigators:
Project Partners:
Department: Materials Science & Metallurgy
Organisation: University of Cambridge
Scheme: Standard Research (Pre-FEC)
Starts: 12 March 1990 Ends: 11 March 1993 Value (£): 74,764
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EPSRC Industrial Sector Classifications:
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Panel History:  
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Organisation Website: http://www.cam.ac.uk