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Details of Grant 

EPSRC Reference: GR/F04797/01
Title: HIGH RESOLUTION MICROSCOPY OF OPTICALLY THICK STRUCTURES IN SEMICONDUCTOR DEVICE METROLOGY
Principal Investigator: Barnett, Dr ME
Other Investigators:
Dainty, Professor JC
Researcher Co-Investigators:
Project Partners:
Department: Dept of Physics
Organisation: Imperial College London
Scheme: Standard Research (Pre-FEC)
Starts: 01 October 1988 Ends: 30 September 1991 Value (£): 66,455
EPSRC Research Topic Classifications:
EPSRC Industrial Sector Classifications:
Related Grants:
Panel History:  
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Organisation Website: http://www.imperial.ac.uk