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EPSRC Reference: GR/D65787/01
Title: NANOMETRE-SCALE ELECTRON BEAM LITHOGRAPHY AND MICROANALYSIS OF LOW DIMENSIONAL STRUCTURE
Principal Investigator: Humphreys, Professor Sir C
Other Investigators:
Pond, Professor R Eaglesham, Dr D
Researcher Co-Investigators:
Project Partners:
Department: Metallurgy and Materials Science
Organisation: University of Liverpool
Scheme: Standard Research (Pre-FEC)
Starts: 15 February 1986 Ends: 14 March 1990 Value (£): 400,613
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Organisation Website: http://www.liv.ac.uk