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EPSRC Reference: GR/A00669/01
Title: AF:KINETICS & DYNAMICS OF IN-SITU ETCHING ON III-V COMPOUND SEMICONDUCTOR SURFACES USING GROUP V HALIDES
Principal Investigator: Zhang, Professor J
Other Investigators:
Researcher Co-Investigators:
Project Partners:
Department: Physics
Organisation: Imperial College London
Scheme: Advanced Fellowship (Pre-FEC)
Starts: 01 April 2000 Ends: 30 September 2001 Value (£): 61,164
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Organisation Website: http://www.imperial.ac.uk