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Details of Grant 

EPSRC Reference: GR/S78919/01
Title: Novel Ion Sources for Application in Nanometer-Scale Surface and Interface Analysis
Principal Investigator: Dowsett, Professor MG
Other Investigators:
McConville, Professor CF
Researcher Co-Investigators:
Project Partners:
INL- Idaho National Laboratory
Department: Physics
Organisation: University of Warwick
Scheme: Standard Research (Pre-FEC)
Starts: 01 November 2004 Ends: 31 December 2007 Value (£): 321,026
EPSRC Research Topic Classifications:
Materials Characterisation
EPSRC Industrial Sector Classifications:
Electronics
Related Grants:
Panel History:
Panel DatePanel NameOutcome
04 Nov 2003 Elec & Functional Mat Panel (Tech) - Nov 2003 Deferred
Summary on Grant Application Form
We propose to develop, test and optimise four different ion sources each of which are either novel in their own right, or novel in the proposed application (or both). These sources are for the production of cluster ions, mixed ion beams, and a micro-focus Cs beam. In conjunction with this, as part of the same project, suitable optics for matching each individual source to the floating low energy ion gun (FLIG) - developed by Dowsett et al. - will also be constructed. These ion sources are intended for applications in depth profiling, rather than top monolayer surface analysis, and are respectively; (i) a duoplasmatron source to produce a mixed beam of Xe+ and Cs+ ions, (ii) a cluster ion source producing negative ions such as Au n(n=2,3) - but also suitable for many other species, (iii) a solid state cluster source producing perrhenate ions such as Re04-, and (iv) a liquid metal source (LMIS) specifically engineered for a Cs+ microfocus beam and Cs n+ clusters. All of these source designs, with the exception of (iii), are based on an operational prototype which will be available at the start of the project, but which needs considerable further research and development to make it suitable for the applications area outlined in this proposal.The EVA 2000 SIMS instrument at Warwick is equipped with a FLIG and will be used as the test-bed for the sources. Using the technical resources in the Physics Department, this instrument can be adapted as required for each source and for different applications testing. This will provide an ability to both characterize the sources themselves, and test their effectiveness in various SIMS applications.
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Organisation Website: http://www.warwick.ac.uk