Details of Grant

EPSRC Reference:

GR/S31280/01

Title:

EPSRC Microelectronics Fabrication Facility

Principal Investigator:

Other Investigators:

charlton, Professor MDB	Ashburn, Professor P	Bagnall, Professor D
Melvin, Dr T	Parker, Professor G	Kraft, Professor M
de Groot, Professor C

Researcher Co-Investigators:

Dr G Ensell

Project Partners:

Department:

Electronics and Computer Science

Organisation:

University of Southampton

Scheme:

Standard Research (Pre-FEC)

Starts:

01 August 2003

Ends:

31 March 2004

Value (£):

4,184,468

EPSRC Research Topic Classifications:

Bioelectronic Devices	Electronic Devices & Subsys.
Materials Characterisation	Materials Processing
Materials Synthesis & Growth	Microsystems
Optical Devices & Subsystems	Optoelect. Devices & Circuits
RF & Microwave Technology	VLSI Design

EPSRC Industrial Sector Classifications:

Electronics

Related Grants:

Panel History:

Summary on Grant Application Form

This proposal is for a grant to update the EPSRC Silicon Fabrication Facility to meet user demand and to support its operation over the next four years. The vision of the Facility is for a broad-based capability that is able to meet the demands of users in the new research areas that are currently revolutionising the silicon industry: photonic devices, smart power, MEMS, biological devices, micro systems, nano devices, end-of-roadmap CMOS, post-CMOS devices and SiGe rf. Equipment and staff are requested to provide reduced batch cycle times and funds are requested to allow user research students and RA's rapid access to the Facility. The aim is to dramatically cut the time from the original idea to first devices, so that users can rapidly patent and publish novel device concepts. The equipment requested will also deliver smaller geometries, shallower junctions and a broader range of materials. These capabilities will allow users to access the technologically important nanometer dimensions that are needed for advanced silicon-based devices and provide the flexibility required to create novel devices for the growing multi-disciplinary areas including MEMS and the Life Sciences.

Key Findings

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Potential use in non-academic contexts

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Impacts

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Summary
Date Materialised

Sectors submitted by the Researcher

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Project URL:

Further Information:

Organisation Website:

http://www.soton.ac.uk