| EPSRC Reference: |
GR/S25418/01 |
| Title: |
Development of large area pulsed deposition systems |
| Principal Investigator: |
Kelly, Professor P |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Inst for Materials Research |
| Organisation: |
University of Salford |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 October 2003 |
Ends: |
16 January 2005 |
Value (£): |
246,820
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| EPSRC Research Topic Classifications: |
| Materials Characterisation |
Materials Processing |
| Materials Synthesis & Growth |
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Summary on Grant Application Form |
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The large area deposition of functional films onto both polymeric web and plate glass substrates has been a major area of growth in recent years. Driving this growth has been the development of the mid-frequency (20-350 kHz) dual bipolar pulsed magnetron sputtering process, which now permits complex, multi-layer structures with specific properties to be routinely deposited in high throughput systems. There are, though, several variants oft dual bipolar process currently employed, with each variant imposing its own set of criteria in terms of cost, process stability, throughput and product performance. However, understanding of the underlying science lags behind the applications, which limits the ability to design and optimise novel technological systems. Thus, at present there is a lack of detailed understanding of many fundamental aspects of this complex process. This propc seeks to address this issue through detailed studies of the role played by specific elements of the process, including magnetron design and configuration, driving voltage waveforms, anode design and configuration and power deposition and dissipation within the system. We will perform ti studies in an industrially relevant deposition system, which will then permit technology transfer to take place to pilot scale production facilities at our collaborators establishments.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.salford.ac.uk |