| EPSRC Reference: |
GR/R97474/01 |
| Title: |
Vacuum ultraviolet atomic nitrogen generators and their applications |
| Principal Investigator: |
Boyd, Professor I |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Electronic and Electrical Engineering |
| Organisation: |
UCL |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 November 2002 |
Ends: |
31 October 2005 |
Value (£): |
333,667
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| EPSRC Research Topic Classifications: |
| Optical Devices & Subsystems |
Optical Phenomena |
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Summary on Grant Application Form |
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Plasma sources commonly employed for providing atomic nitrogen exhibit well-known limitations as to output of energetic species, cost, complexity, and lexibility. Therefore, there is a recognised demand for cheap, large area atomic nitrogen sources which can provide higher atom efficiency while resulting in as ow as possible residual ion current and kinetic energy radicals. This project aims to develop a novel nitrogen atom source by exploring the properties and uses of dielectric barrier discharge (silent discharge) in rare gases, which offers all of the above-mentioned properties desired. The wavelength to be explored is the iacuum UV 126 nm, which corresponds to a photon energy of 9.84 eV, just sufficient to break N triple bonds (bond energy - 9.81 eV) to produce nitrogen atoms Nhile resulting in few ionised species. It thus dispenses with the need for additional complicated ion-trap options required in plasma sources to remove the esidual ion content from the beam. Such a system can be used both as an atomic nitrogen generator and as a photochemical reactor. Upon extracting the most mportant operating parameters and optimising the efficiency and output of such systems, applications in material nitriding and doping will also be explored.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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