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Details of Grant 

EPSRC Reference: GR/R62977/01
Title: Microelectronics Fabrication Facility
Principal Investigator: Evans, Professor A
Other Investigators:
Ensell, Dr G Kraft, Professor M Parker, Professor G
Ashburn, Professor P Bagnall, Professor D Bagnall, Dr D
Researcher Co-Investigators:
Project Partners:
Department: Electronics and Computer Science
Organisation: University of Southampton
Scheme: Standard Research (Pre-FEC)
Starts: 01 August 2002 Ends: 31 July 2003 Value (£): 1,709,753
EPSRC Research Topic Classifications:
Electronic Devices & Subsys. Optical Devices & Subsystems
Optoelect. Devices & Circuits Power Electronics
RF & Microwave Technology System on Chip
VLSI Design
EPSRC Industrial Sector Classifications:
Electronics
Related Grants:
Panel History:  
Summary on Grant Application Form
Silicon related devices will be researched and developed for the forseeable future. New devices, materials, techniques and geometries will emerge as the new areas such as BIO MEMS, heterostructure devices, integrated optics and low dimensional structures are developed. The support of this research requires the pool of relevant equipment and expetise at the Southampton Centre to be kept up to date. This proposal seeks continued funding for this infrastructure.
Key Findings
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Potential use in non-academic contexts
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Impacts
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Summary
Date Materialised
Sectors submitted by the Researcher
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Project URL:  
Further Information:  
Organisation Website: http://www.soton.ac.uk