| EPSRC Reference: |
GR/R46663/01 |
| Title: |
Feasibility study of Focussed Ion Beam (FIB) direct write for micro-photonic applications |
| Principal Investigator: |
Eason, Professor RW |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Optoelectronics Research Ctr (closed) |
| Organisation: |
University of Southampton |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
19 June 2001 |
Ends: |
18 March 2002 |
Value (£): |
10,000
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| EPSRC Research Topic Classifications: |
| Optical Devices & Subsystems |
Optoelect. Devices & Circuits |
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| EPSRC Industrial Sector Classifications: |
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| Panel History: |
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Summary on Grant Application Form |
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Focussed Ion Beam (FIB) technology has been applied very successfully to a wide range of activities in the microelectronics and semiconductor sectors, but much less extensively, if at all, to host materials such as nonlinear optical, ferroelectrics and piezoelectrics. We intend to write metal electrodes, gratings and ion-beam masks on a range of crystal hosts for subsequent actuation, implantation an duse in electric field periodic poling studies.The aim is to establish the utility of this technique using a range of line widths and deposition conditions in areas where FIB has currently not been applied. MEMS and MOEMS structures will be investigated and once the technique is shown to be sucessful, a larger 2-3 year grant will be proposed, using the results of this feasibility study.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.soton.ac.uk |