| EPSRC Reference: |
GR/R39153/01 |
| Title: |
Non-Invasive Real-Time Process Analysis and Prediction of Technological Plasmas |
| Principal Investigator: |
Kenyon, Professor AJ |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
Electronic and Electrical Engineering |
| Organisation: |
UCL |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 January 2002 |
Ends: |
28 February 2005 |
Value (£): |
182,414
|
| EPSRC Research Topic Classifications: |
|
| EPSRC Industrial Sector Classifications: |
| Manufacturing |
Electronics |
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
The project will develop a novel non-invasive remote-coupled RF probe which will enable accurate determination and prediction of plasma process end-points. the instrument will be the first realisation of a fully functional ex-situ vector plasma impedance analyser, and will use the increased process sensitivity afforded >y capturing harmonic phase and amplitude data to improve substantially on the current achievable end-point detection limits. Key features of the proposed nstrument are that it will be truly non-invasive, requiring no reengineering of plasma tools, and it will have a very high directivity (>25 dB) and probe isolation >30 dB) from signal. We will extend RIF techniques recently developed at UCL to extract the plasma impedance from the plasma tool electrical characteristics, enabling data driven analysis to be used to determine end point response. Our target is to accurately and repeatably predict a process end point for etching 0.1 cm2 photoresist. This represents an increase in sensitivity of one order of magnitude over the current state of the art. At present our probe technology can detect a 2 dB change in signal strength for etching 1 cm2 of photoresist. No other non-invasive probe has achieved this degree of sensitivity.
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
|