| EPSRC Reference: |
GR/R07851/01 |
| Title: |
Mems Technology For Silicon Opto-Hybrids |
| Principal Investigator: |
Moore, Dr DF |
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| Department: |
Engineering |
| Organisation: |
University of Cambridge |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
29 June 2001 |
Ends: |
28 June 2004 |
Value (£): |
150,337
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Summary on Grant Application Form |
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This project is a collaboration between three leading UK University MST groups at Imperial College, Cambridge and Strathclyde, to develop silicon micromachining technology for low cost assembly and interconnection of optics, fibres and optoelectronic components. The micromechanical properties of thin films, such as thick silicon nitride or single crystal silicon, will be used for the kinematic location of optical components in silicon breadboards. Novel structures for the precise alignment of filters and hybrid chips will included double side passive mounting fixtures based on elastic cantilevers formed by deep dry etching of bonded silicon on insulator. Manipulators for the final adjustment of hybrid integrated components will be constructed using four-bar linkage structures and electrostatic actuation. In conjunction with this adjustment technology, toggle clamping mechanisms will be developed to enable the passive clamping of optical structures after alignment. The mounting and adjustment of optic fibres connecting to the breadboards will be investigated using electrothermal actuation followed by clamping. The cost effectiveness of these proposed developments in microassemply technology will be assessed by making demonstrators of complete optical systems on silicon breadbards for various target markets in close collaboration with the industrial partners Nortel, BCO Technologies, Kymata, and Marconi Materials Technology.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.cam.ac.uk |