EPSRC Reference: |
GR/N32181/01 |
Title: |
MEASUREMENT OF THE ELECTRON PARAMETERS IN RF-PLASMAS USING THOMSON SCATTERING |
Principal Investigator: |
Morrow, Dr T |
Other Investigators: |
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Researcher Co-Investigators: |
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Project Partners: |
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Department: |
Sch of Mathematics and Physics |
Organisation: |
Queen's University of Belfast |
Scheme: |
Standard Research (Pre-FEC) |
Starts: |
01 June 2000 |
Ends: |
30 November 2002 |
Value (£): |
138,525
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EPSRC Research Topic Classifications: |
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EPSRC Industrial Sector Classifications: |
Electronics |
No relevance to Underpinning Sectors |
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Related Grants: |
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Panel History: |
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Summary on Grant Application Form |
Having demonstrated the technique for measuring complex (non-Maxwellian) eedfs in low-pressure technological plasmas it is now proposed to exploit our gated-ICCD Thomson scattering diagnostic to study some aspects of low temperature plasma physics not otherwise accessible. In contrast to electrostatic probes the Thomson technique is non-intrusive/non-perturbative, therefore applicable to aggressive plasma environments, and interpretation of the experimental data is relatively straightforward and unambiguous. When operated with a short pulse laser in conjunction with spatial imaging of the scatter volume the Thomson technique can provide spatially and temporally resolved eedf measurements and it is in this area that our programme will initially focus. Initial pioneering measurements will be made in inert gas discharges in both capacitive and inductive modes. Spatio-temporally resolved measurements will then be extended to molecular and electronegative plasmas, in particular to resolve current issues relating to instabilities in the latter.
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Key Findings |
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Potential use in non-academic contexts |
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Impacts |
Description |
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Summary |
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Date Materialised |
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Sectors submitted by the Researcher |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Project URL: |
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Further Information: |
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Organisation Website: |
http://www.qub.ac.uk |