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Details of Grant 

EPSRC Reference: GR/N32181/01
Title: MEASUREMENT OF THE ELECTRON PARAMETERS IN RF-PLASMAS USING THOMSON SCATTERING
Principal Investigator: Morrow, Dr T
Other Investigators:
Graham, Professor WG
Researcher Co-Investigators:
Project Partners:
Department: Sch of Mathematics and Physics
Organisation: Queen's University of Belfast
Scheme: Standard Research (Pre-FEC)
Starts: 01 June 2000 Ends: 30 November 2002 Value (£): 138,525
EPSRC Research Topic Classifications:
Plasmas - Technological
EPSRC Industrial Sector Classifications:
Electronics No relevance to Underpinning Sectors
Related Grants:
Panel History:  
Summary on Grant Application Form
Having demonstrated the technique for measuring complex (non-Maxwellian) eedfs in low-pressure technological plasmas it is now proposed to exploit our gated-ICCD Thomson scattering diagnostic to study some aspects of low temperature plasma physics not otherwise accessible. In contrast to electrostatic probes the Thomson technique is non-intrusive/non-perturbative, therefore applicable to aggressive plasma environments, and interpretation of the experimental data is relatively straightforward and unambiguous. When operated with a short pulse laser in conjunction with spatial imaging of the scatter volume the Thomson technique can provide spatially and temporally resolved eedf measurements and it is in this area that our programme will initially focus. Initial pioneering measurements will be made in inert gas discharges in both capacitive and inductive modes. Spatio-temporally resolved measurements will then be extended to molecular and electronegative plasmas, in particular to resolve current issues relating to instabilities in the latter.
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Organisation Website: http://www.qub.ac.uk