EPSRC Reference: |
GR/N06113/01 |
Title: |
MICROENGINEERED RADIATION COLLECTOR ARRAYS FOR UNCOOLED THERMAL IR DETECTORS |
Principal Investigator: |
Whatmore, Professor RW |
Other Investigators: |
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Researcher Co-Investigators: |
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Project Partners: |
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Department: |
Sch of Industrial and Manufacturing Scie |
Organisation: |
Cranfield University |
Scheme: |
Standard Research (Pre-FEC) |
Starts: |
01 July 2000 |
Ends: |
31 March 2004 |
Value (£): |
275,688
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EPSRC Research Topic Classifications: |
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EPSRC Industrial Sector Classifications: |
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Related Grants: |
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Panel History: |
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Summary on Grant Application Form |
The proposed project will take ferroelectric thin film technology for the fabrication of thin pyroelectric materials and combine it with deep reactive ion etch technology to form a novel uncooled pyroelectric array structure which will use arrays of conical or parabolic cavities to collect 8 to 12 micron wavelength IR onto small freely suspended thin film pyroelectric elements. It involves a range of technologies, especially thin film oxide ferroelectric deposition by sol gel and the development of a novel variant on DRIE to permit the fabrication of cavities with non-vertical sidewalls of a controlled profile. It will entail the combination of these technologies with other device fabrication processes to allow the manufacture of the complete array. It will also involve the bybridisation of complete 16x16 arrays with an exisitng Si readout chip design. Initially predictions indicate that the structure should give up to a factor of 20 reduction (ie better) noise equivalent power (NEP) in comparison with arrays which do not emply this type of collector.
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Key Findings |
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Potential use in non-academic contexts |
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Impacts |
Description |
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Summary |
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Date Materialised |
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Sectors submitted by the Researcher |
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Project URL: |
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Further Information: |
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Organisation Website: |
http://www.cranfield.ac.uk |