| EPSRC Reference: |
GR/N06007/01 |
| Title: |
THIN FILM PIEZOELECTRIC ACTUATION FOR MICROENGINEERED MICROWAVE COMPONENTS:FABRICATION PACKAGING & TESTING |
| Principal Investigator: |
Kirby, Dr PB |
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| Department: |
Sch of Industrial and Manufacturing Scie |
| Organisation: |
Cranfield University |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 October 2000 |
Ends: |
31 December 2003 |
Value (£): |
192,365
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Summary on Grant Application Form |
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This programme is a collaborative design, modelling, fabrication and packaging study of incorporating piezoelectric thin films onto silicon microstructures to demonstrate useful high-frequency components for microwave circuits.Analytical and FE modelling techniques will be applied at Nottingham University to investigate a range of micromachined structures that can be actuated in a controlled fashion. Particular emphasis will be placed on structures relevant to microwave switches, voltage-tunable capacitors and micromechanical resonators for filter applications. Design rules will be developed where possible.At Cranfield University patterning and etching techniques will be developed to allow fabrication of a piezoelectrically actuated microwave microswitch. Packaging studies will be undertaken by Micro Circuit Engineering (MCE) and the device incorporated into a MCE and MMS designed microwave circuit for testing at Cranfield. MMS will undertake space qualification and testing.The feasibility of using the technology developed in the programme as a means to produce novel micro-mechanical resonators and filters and voltage controlled capacitors will be assessed by modelling studies and taking into account the findings from fabrication of the microswitch.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.cranfield.ac.uk |