Details of Grant 

EPSRC Reference:	GR/N00302/01
Title:	ROPA: MICROSTRUCTURED LINBO3:APPLICATIONS TO MEMS TECHNOLOGY
Principal Investigator:	Eason, Professor RW
Other Investigators:
Researcher Co-Investigators:
Project Partners:
Department:	Optoelectronics Research Ctr (closed)
Organisation:	University of Southampton
Scheme:	ROPA
Starts:	01 February 2000	Ends:	31 January 2002	Value (£):	143,423
EPSRC Research Topic Classifications:	Microsystems
EPSRC Industrial Sector Classifications:	No relevance to Underpinning Sectors
Related Grants:
Panel History:
Summary on Grant Application Form
This ROPA is directed towards further development of our recent achievements in microstructuring LiNbO3. To date we have fabricated a range of structures that include ridges, grooves, slots and microbeams; we now intend to demonstrate their functional utility. We will design and fabricate microcantilevers, membranes and tips for use in a range of applications involving resonant structures, imcrodeflection, chemical sensing and scanning probe microscopy. The immediate advantage of LiNb03 over silicon for such MEMS application relate to its intrinsic piezoelectric (hence inverse piezoelectric), pyroeletrical and electro-optic coefficients, none of which are present in silicon. The aim of this ROPA is to demonstrate a useful functional capability in an active microstructured material.
Key Findings
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Potential use in non-academic contexts
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Impacts
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Project URL:
Further Information:
Organisation Website:	http://www.soton.ac.uk