| EPSRC Reference: |
GR/M69661/01 |
| Title: |
FUNDAMENTAL MOLECULAR BEAM STUDIES OF ATOM/RADICAL/ ION-INDUCED REACTIONS IN PLASMA-SURFACE INTERACTIONS |
| Principal Investigator: |
Gorry, Dr P |
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| Department: |
Chemistry |
| Organisation: |
Victoria University of Manchester, The |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 March 2000 |
Ends: |
30 November 2003 |
Value (£): |
187,584
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| EPSRC Research Topic Classifications: |
| Plasmas - Technological |
Surfaces & Interfaces |
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| EPSRC Industrial Sector Classifications: |
| Electronics |
No relevance to Underpinning Sectors |
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Summary on Grant Application Form |
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A unique molecular beam-surface scattering apparatus will be developed the study the reactions of atoms, molecular radicals and ions with semiconductor III-V surfaces important in plasma etching. The species that are scattered from the surface will be detected by a high resolution time-of-flight mass spectrometer. The experiment will be able to vary a wide range of parameters (energy, surface temperature, angle of incidence and recoil). Measurements will include identification of reaction products, thermal accommodation coefficients, sticking coefficients, orders of reaction and rate coefficients. The reactive species will include halogen atoms, hydrogen halides and radicals such as SiCl2. Such a study will yield a fundamental insight into the surface chemistry involved in the plasma etching of semiconductors at a molecular level and provide modellers with presently available information.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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