| EPSRC Reference: |
GR/M61405/01 |
| Title: |
NEW METHODS OF SEMICONDUCTOR ANALYSIS USING A MODIFIED SURREY NUCLEAR MICROPROBE |
| Principal Investigator: |
Breese, Dr M |
| Other Investigators: |
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| Department: |
Physics |
| Organisation: |
University of Surrey |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
03 June 1999 |
Ends: |
02 December 2000 |
Value (£): |
38,320
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| EPSRC Research Topic Classifications: |
| Materials Characterisation |
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| EPSRC Industrial Sector Classifications: |
| No relevance to Underpinning Sectors |
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Summary on Grant Application Form |
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New materials characterisation techniques will be established on the existing Surrey nuclear microprobe for crystallographic and electronic characterisation of a range of semiconductor structures. To facilitate this enhanced analytical capability, both the hardware and data acquisition software need improving. The attainable spatial resolution will be improved from 5 um to <1 um and data acquisition software will be upgraded to a PC based, user-friendly system.The formation of defects and bubbles in silicon which has been implanted with hydrogen under a variety of conditions will be studies using transmission ion channeling, with minimal sample preparation ensuring that there is no alteration of the implanted layer defects and bubbles prior to analysis. Measurements of lattice strain and dislocation density from micron-size areas of three-dimensional strained-layer structures such as SiGe/Si and GaAs/Si mesas and etched planar structures. IBIC microscopy will be used to demonstrate its ability for imaging buried transistors and other features in microelectronic devices through surface layers of 10 um or more in thickness. The linearity of the germanium composition, thickness, crystalline perfection and amount of strain-induced plane bending in graded composition SiGe/Si layers will be measured using various modes of MeV ion channeling analysis.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.surrey.ac.uk |