| EPSRC Reference: |
GR/M54001/01 |
| Title: |
A DEPTH-TUNABLE PROBE, WITH MAPPING CAPABILITY, FOR LOW ENERGY ION IMPLANTATION DOSIMETRY |
| Principal Investigator: |
Sealy, Professor B |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Sch of Electronics & Physical Sciences |
| Organisation: |
University of Surrey |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 September 1999 |
Ends: |
31 August 2003 |
Value (£): |
15,210
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| EPSRC Research Topic Classifications: |
| Condensed Matter Physics |
Instrumentation Eng. & Dev. |
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| EPSRC Industrial Sector Classifications: |
| Electronics |
No relevance to Underpinning Sectors |
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Summary on Grant Application Form |
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The design and construction of an instrument is proposed which provides a novel method - positron dosimetry - for the measurement of doses of implanted ions, with significant advantages over other available techniques. The non-destructive method, applied using a compact apparatus of novel design, is especially suited to measurements within 100nm of the surface, which will be particularly relevant to the next generation of smaller scale semiconductor devices.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.surrey.ac.uk |