| EPSRC Reference: |
GR/M52175/01 |
| Title: |
A COMBINED ULTRA LOW ENERGY SIMS AND MEDIUM ENERGY ION SCATTERING INSTRUMENT FOR NANOMETER - SCALE ANALYSIS |
| Principal Investigator: |
Dowsett, Professor MG |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
Physics |
| Organisation: |
University of Warwick |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 April 1999 |
Ends: |
31 December 2003 |
Value (£): |
498,267
|
| EPSRC Research Topic Classifications: |
| Instrumentation Eng. & Dev. |
Surfaces & Interfaces |
|
| EPSRC Industrial Sector Classifications: |
| Manufacturing |
Electronics |
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
Ultra low energy SIMS depth profiling and MEIS are highly complimentary analytical techniques which have never before been combined on one instrument. The former technique is itself new, and is currently the object of intense commercial development and exploitation since the invention of the floating low energy ion gun (FLIG) by one of the applicants. We propose to build a unified instrument for both techniques in parallel to exploit to the full their synergetic relationship. The instrument will enable extensive MEIS study of the effects of SIMS depth profiling in the sub-keV range, and the exceptionally thin band of damage caused by 100-200 eV sputtering will allow MEIS to be combined with sputter profiling to extend the range of the technique to several microns. Overall the instrument will be capable of sub-nm depth resolution and quantitative analysis over the range 100% to ppb, and quantification methods developed in complimentary SIMS and MEIS studies will be immediately applicable to stand-alone SIMS analysis. Instrument modules developed will have excellent prospects for commercial exploitation as will the whole instrument.
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
http://www.warwick.ac.uk |