| EPSRC Reference: |
GR/M50034/02 |
| Title: |
COMBINED INTERFEROMETER AND LASER LIGHT SCATTERING MONITOR FOR MULTI-WAFER MOCVD |
| Principal Investigator: |
Irvine, Professor SJC |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Sch of Chemistry |
| Organisation: |
Bangor University |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 October 2000 |
Ends: |
31 December 2002 |
Value (£): |
178,440
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| EPSRC Research Topic Classifications: |
| Instrumentation Eng. & Dev. |
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| EPSRC Industrial Sector Classifications: |
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| Related Grants: |
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| Panel History: |
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Summary on Grant Application Form |
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This proposal will develop our existing laser interferometer, used very successfully in single wafer MOCVD reactors, to be combined with laser light scattering and dual wavelength for use in a multi-wafer production reactor.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.bangor.ac.uk |