| EPSRC Reference: |
GR/M41223/01 |
| Title: |
A NEW APPROACH TO THE PRODUCTION OF HIGH RESOLUTION X-RAY MASKS |
| Principal Investigator: |
Cairns, Professor JA |
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| Department: |
Electronic Engineering and Physics |
| Organisation: |
University of Dundee |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 April 1999 |
Ends: |
31 March 2002 |
Value (£): |
195,379
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Summary on Grant Application Form |
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Current methods of photomask manufacture which rely on imported raw material from Japan, will have to adapt in order to produce the x-ray masks which will be required for future high density integrated circuits. We propose here a means to achieve this by using electro-induced decomposition of a novel range of organometallic compounds on to x-ray-transparent membranes. We have demonstrated the feasibility of this approach and plan to evaluate the performance of the x-ray masks by using the laser plasma x-ray source at the Rutherford Appleton Laboratory.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.dundee.ac.uk |