| EPSRC Reference: |
GR/M39701/01 |
| Title: |
SIMS APPLICATIONS & TECHNIQUE DEVELOPMENT FOR NM-SCALE DEPTH RESOLUTION AND ULTRA_SHALLOW PROFILING |
| Principal Investigator: |
Dowsett, Professor MG |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Physics |
| Organisation: |
University of Warwick |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 December 1998 |
Ends: |
31 August 2002 |
Value (£): |
208,666
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| EPSRC Research Topic Classifications: |
| Materials Characterisation |
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| EPSRC Industrial Sector Classifications: |
| Manufacturing |
Communications |
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Summary on Grant Application Form |
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New SIMS depth profiling instrumentation - the Atomika 4500 - based on technology originally developed by the applicant, will be installed at Warwick Autumn 1998. Combined with the EVA series instruments designed and built in house, this will provide a uniquely powerful analytical facility on a world scale, whose full exploitation requires continued parallel development of applications, technique, data processing and instrumentation. Here, we address SIMS applications and methods for the novel sub-keV (and increasingly sub-500 eV) SIMS profiling regime. The experience of the personnel available makes it possible to define a programme containing fundamental science (e.g. aspects of the ion-solid interaction), applications and method development (e.g. continued evolution of our maximum entropy profile quantification package), and novel methods of instrument control (e.g. chirped ion beams). Direct beneficiaries will be the UK semiconductor research community who will have access to new SIMS capability as it is developed, Ionoptika Ltd. (Southampton) and Atomika GmbH (Munich) (who, beyond their JREI Commitment, will between them provide additional support in excess of 190,000 over the next three years), and other areas of UK materials research as the range of applications in expanded.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.warwick.ac.uk |