| EPSRC Reference: |
GR/K90081/01 |
| Title: |
AN INTERGRATED APPROACH TO NANOSCALE FABRICATION |
| Principal Investigator: |
Jones, Dr G |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Physics |
| Organisation: |
University of Cambridge |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
07 February 1997 |
Ends: |
06 February 2000 |
Value (£): |
121,581
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Summary on Grant Application Form |
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The aim of this proposal is to combine together a set of fabrication processes which will yield a true nanoscale fabrication technology. The proposal is centred particularly within the field of semiconductors but has potential in generating nanoartefacts for other non-electronic applications. Since the only real tools which can manipulate material truly at the atomic scale, in both lateral dimensions and with total flexibility are based on scanning probes, this proposal will utilise an STM. However scanning probe techniques are severely limited in terms of real coverage and throughput and thus are not suitable as stand alone techniques. Here we wish to integrate the STM with MBE growth, focused ion implantation and radical ion etching in a mix and match process, where only the very small, critical areas are exposed by the STM, whilst the remaining features are defined using focused ion beams or selective growth techniques. The method will utilise the selective oxidation of hydrogenated surfaces to form a mask against selective etching using in situ radical C12/H2 ion etching.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.cam.ac.uk |