| EPSRC Reference: |
GR/K71462/01 |
| Title: |
THE DEVELOPMENT AND APPLICATION OF SECONDARY ION MASS SPECTROMETRY(SIMS)FOR NANOAREA ANALYSIS |
| Principal Investigator: |
Dowsett, Professor MG |
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| Department: |
Physics |
| Organisation: |
University of Warwick |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 October 1995 |
Ends: |
31 December 1997 |
Value (£): |
106,405
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| Manufacturing |
Electronics |
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Summary on Grant Application Form |
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Secondary ion mass spectrometry (SIMS) is a powerful technique for the chemical analysis, at high spatial resolution, of small volumes of non-volatile material. Using unique SIMS instrument technology we propose to develop general SIMS methods for nanoanalysis concentrating on three main areas:(i) the development of overall methodologies for nanoscale sampel analysis using instruments which acquire images by a variety of constrast mechanisms, and localised concentration profiles by SIMS which have an extremely high level of direction control over their primary beams, and for which we have developed an ultra high precision specimen stage based on inchworm technology.(ii) the further development of a unique caesium ion gun with potential for both nanoarea imaging (by SIMS and ion induced secondary electrons (ISE)) and micromachining. The ion gun, based on an emitter developed for space thruster applications by ESA, is the only Cs liquid metal ion column avilable outside Japan.(iii) the application of image and depth profile quantification methods is based on multivariate statistical analysis and maximum entropy deconvolution under developed or developed in EPSRC and DTI projects. We will test the developments with a range of pilot applications including cell adhesion, nanoscale characterisation of silicon and organic devices, and trench isolation for Terra Hertz devices.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.warwick.ac.uk |