| EPSRC Reference: |
GR/K58067/01 |
| Title: |
ELECTRICAL MODIFICATION OF ELECTRON ENERGY DIST. IN LOW TEMPERATURE PLASMAS |
| Principal Investigator: |
Braithwaite, Professor NS |
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| Department: |
Materials Engineering |
| Organisation: |
The Open University |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 November 1995 |
Ends: |
31 October 1997 |
Value (£): |
107,556
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Summary on Grant Application Form |
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This project aims to investigate electrical means to tailor plasma properties so that more effective use can be made of particular plasma sources. This will be achieved by extracting electrons from one plasma and injecting them into another whose properties are to be modified.Discharge plasmas are now used for a wide variety of materials processing from large area polymer treatments to micro-machining. The efficiency and effectiveness of each process may benefit from a greater degree of control over the physical and chemical interactions throughout the plasma and these in turn can be manipulated through the electron energy distribution. The UK is a major supplier of plasma processing equipment.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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