| EPSRC Reference: |
GR/K54595/01 |
| Title: |
INVESTIGATION OF PHASE FILTERS FOR ENHANCEMENT OF SUBMICRON OPTICAL LITHOGRAPHY SYSTEMS (JOINT WITH RAL) |
| Principal Investigator: |
Wilson, Professor T |
| Other Investigators: |
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| Project Partners: |
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| Department: |
Engineering Science |
| Organisation: |
University of Oxford |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 July 1995 |
Ends: |
31 March 1998 |
Value (£): |
206,772
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| EPSRC Research Topic Classifications: |
| Optoelect. Devices & Circuits |
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Summary on Grant Application Form |
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Investigation of the design and assessment of phase filters for the enhancement of performance of conventional lithography systems operating at less than 0.5 m minimum feature size. Designs will be based on iterative optimization. Filters to modify both the projection lens performance and the source will be considered. Joint assessment of performance will take place at RAL using a specially designed lens.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.ox.ac.uk |