| EPSRC Reference: |
GR/K54182/01 |
| Title: |
A STUDY OF RF DRIVEN HYDROGEN DISCHARGES |
| Principal Investigator: |
Graham, Professor WG |
| Other Investigators: |
|
| Researcher Co-Investigators: |
|
| Project Partners: |
|
| Department: |
Sch of Mathematics and Physics |
| Organisation: |
Queen's University of Belfast |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
11 May 1995 |
Ends: |
10 May 1998 |
Value (£): |
205,271
|
| EPSRC Research Topic Classifications: |
|
| EPSRC Industrial Sector Classifications: |
|
| Related Grants: |
|
| Panel History: |
|
|
Summary on Grant Application Form |
|
The sheath structure in rf driven hydrogen discharges will be studied using a range of time and space resolved diagnostic techniques. This will allow the electron heating mechanisms, which create and sustain such discharges, to be explored. An important part of the programme will be the measurement of the electron energy distribution function in the discharge, a key parameter in characterising the discharge.Low temperature plasmas of the type to be studied here are of both great intrinsic and techological interest. The challenge of understanding the complex interplay of plasma, atomic, molecular, surface and chemical processes that is inherent in the study of such plasmas is matched by their exciting applications. Recent developments in the ability to model complex systems in computer simulations, to acquire and process data rapidly and developments in diagnostic techniques, particularly those using lasers, has revived interest in the study of these complex systems. These developments have opened up the possibility of CAD-based design of plasma processing systems.
|
|
Key Findings |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Potential use in non-academic contexts |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
|
Impacts |
|
| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
|
| Date Materialised |
|
|
|
|
Sectors submitted by the Researcher |
|
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
|
| Project URL: |
|
| Further Information: |
|
| Organisation Website: |
http://www.qub.ac.uk |