| EPSRC Reference: |
GR/K24307/01 |
| Title: |
NANOFABRICATION OF SCANNED PROBE MICROSCOPE SENSORS |
| Principal Investigator: |
Weaver, Professor JMR |
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| Department: |
Electronics and Electrical Engineering |
| Organisation: |
University of Glasgow |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 September 1994 |
Ends: |
31 August 1996 |
Value (£): |
218,408
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Summary on Grant Application Form |
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The programme of research is concerned with the use of modern electron beam lithography techniques to fabricate novel sensors for use in scanned probe microscopy. The sensors are to be fabricated on the end of nitride and silicon force sensors to permit independent control of tip-to-sample spacing. The use of electron-beam-lithography gives a high degree of uniformity from probe-to-probe with consistent high spatial resolution. By choosing sensors which are intrinsically capable of making quantitative measurements of physical properties of interest this uniformity makes quantitative microscopy relatively straightforward. For example, the use of a Hall bar gives a direct measurement of magnetic field in Teslas over a specimen with little distortion of ferromagnetic domain boundaries, and requires a simple free-space calibration. A thermocouple similarly gives a measure of temperature in Kelvin. The sensors will be fabricated with an eye to the eventual evolution of a generic fabrication technology. Careful attention has been given to the need to ensure continuity of the technology after termination of the project. This is achieved by strategic involvement of permanent technical staff in the fabrication of the sensors.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.gla.ac.uk |