| EPSRC Reference: |
GR/J67352/01 |
| Title: |
LASER MEASUREMENTS OF VELOCITY DISTRIBUTIONS OF IONS AND NEUTRALS IN A RF PLASMA |
| Principal Investigator: |
Hancock, Professor G |
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| Department: |
Oxford Chemistry |
| Organisation: |
University of Oxford |
| Scheme: |
Standard Research (Pre-FEC) |
| Starts: |
01 April 1994 |
Ends: |
31 December 1995 |
Value (£): |
166,848
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Summary on Grant Application Form |
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Ion and neutral velocity distributions are to be measured in a parallel plate RF plasma reactor by the technique of Doppler resolved laser induced fluorescence. N2+ will first be studied, with full spatial resolution close to the electrode surfaces. Results will be compared with velocity distributions* measured with a simple ion analyser. Fast neutrals produced by charge exchange will be observed, and velocity distributions of species leaving the surface are to be measured.* calculated by Monte Carlo simulations, and with energy distributions.
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.ox.ac.uk |