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Details of Grant 

EPSRC Reference: GR/J35160/01
Title: INTERPRETATION AND INVERSION OF SPUTTER DEPTH PROFILES BASED IMPETUS TREATMENT OF THE RELOCATION PROCESSES
Principal Investigator: Armour, Professor D
Other Investigators:
van den Berg, Professor J Wadsworth, Dr M
Researcher Co-Investigators:
Project Partners:
Department: Electronic and Electrical Engineering
Organisation: University of Salford
Scheme: Standard Research (Pre-FEC)
Starts: 01 April 1994 Ends: 31 March 1997 Value (£): 101,714
EPSRC Research Topic Classifications:
Materials Characterisation
EPSRC Industrial Sector Classifications:
Related Grants:
Panel History:  
Summary on Grant Application Form
The programme proposed is to utilise the IMPETUS atomic mixing code to enable measured sputter depth profiles to be interpreted directly in terms of initial composition versus depth profiles. A linear process will be treated first followed by an investigation of various inversion techniques. The ultimate aim is to produce a code to invert measured profiles using the full, nonlinear forward operator and an optimised inversion process. In the first instance only one full experimentally characterised material system under specified bombardment conditions will be treated.
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Organisation Website: http://www.salford.ac.uk