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Details of Grant 

EPSRC Reference: EP/T023899/1
Title: EPSRC Capital Award for Core Equipment: University of Oxford
Principal Investigator: Grant, Professor P
Other Investigators:
Morris, Professor S Krishnan, Professor M Taylor, Professor RA
Bhaskaran, Professor H
Researcher Co-Investigators:
Project Partners:
Department: Materials
Organisation: University of Oxford
Scheme: Standard Research - NR1
Starts: 29 November 2019 Ends: 28 May 2021 Value (£): 699,972
EPSRC Research Topic Classifications:
Condensed Matter Physics Instrumentation Eng. & Dev.
Materials Characterisation Materials Synthesis & Growth
EPSRC Industrial Sector Classifications:
No relevance to Underpinning Sectors
Related Grants:
Panel History:
Panel DatePanel NameOutcome
05 Nov 2019 EPSRC Capital Award for Core Equipment Announced
Summary on Grant Application Form
This bid is to significantly modernize and upgrade Oxford's current capability and capacity in manufacturing engineering at the micro- and nano-scale across our departments of Chemistry, Engineering Science, Materials, and Physics. Our goal is to combine next-generation, nano/micro-manufacturing tools with state-of-the-art fabrication processes in order to realise a range of cutting-edge technologies and major scientific breakthroughs across a broad gamut of fields in the physical sciences.

In recent years, Oxford has become a leader in the development of new and advanced nano-manufacturing methodologies (such as photonic computing, displays, aberration-corrected 3D direct laser writing and additive nano-manufacturing); we wish to capitalise on this with the following investments in our underpinning micro/nano fabrication facilities:

Combined Atomic Layer Deposition and Physical Vapour Deposition System

Plasma-enhanced chemical vapour deposition

Mask aligner

Digital 3D imaging microscope

The new instruments will be co-located in a centralised cleanroom which houses a variety of existing micro-, nano-, and photo-fabrication infrastructure, thereby leveraging previous EPSRC and University investments.
Key Findings
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Potential use in non-academic contexts
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Impacts
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Summary
Date Materialised
Sectors submitted by the Researcher
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Project URL:  
Further Information:  
Organisation Website: http://www.ox.ac.uk