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Details of Grant 

EPSRC Reference: EP/K040324/1
Title: Free Access to Nanolithography & Supporting Processes, University of Bath
Principal Investigator: Bending, Professor SJ
Other Investigators:
Andrews, Dr SR Allsopp, Dr D Shields, Dr PA
Researcher Co-Investigators:
Project Partners:
Department: Physics
Organisation: University of Bath
Scheme: Standard Research - NR1
Starts: 01 August 2013 Ends: 31 January 2018 Value (£): 185,431
EPSRC Research Topic Classifications:
EPSRC Industrial Sector Classifications:
Related Grants:
Panel History:
Panel DatePanel NameOutcome
12 Feb 2013 EPSRC Equipment Business Case - February 2013 Announced
Summary on Grant Application Form
We request continued funding for a previous successful EPSRC-funded Equipment Sharing Initiative to provide UK academic groups with free point-of-use access to electron beam nanolithography in the David Bullett Nanofabrication Facility at the University of Bath. Our scheme will focus on providing 'pump-priming' support for new research that is enabled by access to our nanofabrication tools, particularly work at the Physics/Engineering-Biology and Physics/Engineering-Chemistry interdisciplinary interfaces. Not only will we share our extensive design and process expertise with users, but we shall also provide training and support within a comprehensive package of services including nanolithography, wet & dry etching, thin film deposition and SEM/AFM imaging. We will actively seek opportunities to enhance the multi-disciplinary skills of early career users (postgraduate and post-doctoral researchers) whenever possible. We also propose to purchase a new complementary direct-write laser lithography tool that will allow us to offer users a quicker and more versatile service with unique new features for advanced prototyping (e.g., 3D lithography in thick photoresist and/or on non-planar substrates).
Key Findings
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Potential use in non-academic contexts
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Summary
Date Materialised
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Further Information:  
Organisation Website: http://www.bath.ac.uk