| EPSRC Reference: |
EP/K040324/1 |
| Title: |
Free Access to Nanolithography & Supporting Processes, University of Bath |
| Principal Investigator: |
Bending, Professor SJ |
| Other Investigators: |
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| Researcher Co-Investigators: |
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| Project Partners: |
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| Department: |
Physics |
| Organisation: |
University of Bath |
| Scheme: |
Standard Research - NR1 |
| Starts: |
01 August 2013 |
Ends: |
31 January 2018 |
Value (£): |
185,431
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| EPSRC Research Topic Classifications: |
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| EPSRC Industrial Sector Classifications: |
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| Related Grants: |
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| Panel History: |
| Panel Date | Panel Name | Outcome |
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12 Feb 2013
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EPSRC Equipment Business Case - February 2013
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Announced
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Summary on Grant Application Form |
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We request continued funding for a previous successful EPSRC-funded Equipment Sharing Initiative to provide UK academic groups with free point-of-use access to electron beam nanolithography in the David Bullett Nanofabrication Facility at the University of Bath. Our scheme will focus on providing 'pump-priming' support for new research that is enabled by access to our nanofabrication tools, particularly work at the Physics/Engineering-Biology and Physics/Engineering-Chemistry interdisciplinary interfaces. Not only will we share our extensive design and process expertise with users, but we shall also provide training and support within a comprehensive package of services including nanolithography, wet & dry etching, thin film deposition and SEM/AFM imaging. We will actively seek opportunities to enhance the multi-disciplinary skills of early career users (postgraduate and post-doctoral researchers) whenever possible. We also propose to purchase a new complementary direct-write laser lithography tool that will allow us to offer users a quicker and more versatile service with unique new features for advanced prototyping (e.g., 3D lithography in thick photoresist and/or on non-planar substrates).
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Key Findings |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Potential use in non-academic contexts |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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Impacts |
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| Description |
This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk |
| Summary |
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| Date Materialised |
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Sectors submitted by the Researcher |
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This information can now be found on Gateway to Research (GtR) http://gtr.rcuk.ac.uk
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| Project URL: |
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| Further Information: |
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| Organisation Website: |
http://www.bath.ac.uk |