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Details of Grant 

EPSRC Reference: EP/E063500/1
Title: Platform Support for 3D Electrical MEMS
Principal Investigator: Syms, Professor R
Other Investigators:
Yeatman, Professor EM Young, Professor I Solymar, Professor L
Holmes, Professor A Lucyszyn, Professor S
Researcher Co-Investigators:
Project Partners:
Department: Electrical and Electronic Engineering
Organisation: Imperial College London
Scheme: Platform Grants
Starts: 01 January 2008 Ends: 31 December 2011 Value (£): 794,688
EPSRC Research Topic Classifications:
Microsystems RF & Microwave Technology
EPSRC Industrial Sector Classifications:
Related Grants:
Panel History:  
Summary on Grant Application Form
This proposal is for renewal of the platform grant Platform Support in 3D Electrical MEMS , held by the Optical and Semiconductor Devices Group (OSDG), Imperial College London. The grant holders, Prof. Richard Syms, Dr. Andrew Holmes and Prof. Eric Yeatman, have built up a major research activity in micro-electro-mechanical systems (MEMS) over the last 14 years, and their group is the largest in this field in UK academia. One of the main areas of innovation for the group has been in methods for fabricating truly 3D structures based on planar semiconductor processing techniques. In recent years these techniques have been increasingly employed to develop electrical applications, including MRI/MRS detectors, ultra-low-power radio and micropower generation. The current platform grant (Jan 2004 - Dec 2007) has supported the establishment, development and unification of these themes, and thus to establish the group as an internationally recognised centre of excellence in electrical MEMS. It has also aided the creation of several important international collaborations. We have disseminated our work widely and extensively, and the flexibility of the platform funding has helped widen our dissemination activities beyond the conventional routes, such as coordinating the Electronic Systems theme within the International Review of UK Engineering Research 2004.Building on this success, we plan to extend and broaden our research in the current topic areas, and also to develop new activities in 3D MEMS, namely MEMS for minimally invasive surgery, wireless sensors, and electromagnetic bandgap materials. Platform support will also continue to provide continuity for our research staff, and to allow us to do exploratory work on new topics and ideas as they arise. Such exploratory work is of great assistance in identifying promising topics for larger scale projects, establishing feasibility, and initiating collaborative links. Research collaborations developed under the existing grant will be enhanced, and new links will be established with leading industrial and academic groups in the U.S. and in Europe. Dissemination and public engagement activities will also be enhanced, e.g. with contributions to the non-technical media on our work and its broader significance and context.
Key Findings
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Date Materialised
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Organisation Website: http://www.imperial.ac.uk