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Details of Grant 

EPSRC Reference: GR/J42298/01
Title: THE UNIVERSITY OF SURREY ION BEAM FACILITY FOR MICROELECTRONICS
Principal Investigator: Sealy, Professor B
Other Investigators:
Hemment, Professor P Stephens, Professor K Webb, Professor RP
Researcher Co-Investigators:
Project Partners:
Department: Sch of Electronics & Physical Sciences
Organisation: University of Surrey
Scheme: Standard Research (Pre-FEC)
Starts: 01 February 1994 Ends: 31 October 1995 Value (£): 2,203,948
EPSRC Research Topic Classifications:
Materials Processing Optoelect. Devices & Circuits
EPSRC Industrial Sector Classifications:
Related Grants:
Panel History:  
Summary on Grant Application Form
There are three major aims which reflect the long term objectives of the Facility.(i) To provide ion implantation, ion beam analysis and other measurement and processing facilities for EPSRC supported users and collaborators.(ii) To develop equipment in order to strengthen and broaden the scope of the work carried out and to improve the quality and efficiency of this work.(iii) To develop expertise and to carry out research in new and continuing areas relevant to microelectronics and optoelectronics.
Key Findings
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Potential use in non-academic contexts
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Impacts
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Summary
Date Materialised
Sectors submitted by the Researcher
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Project URL:  
Further Information:  
Organisation Website: http://www.surrey.ac.uk